High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner; Gar-Wing Truong; David Follman; Maximilian Prinz; Georg Winkler; Stephan Puchegger; Garrett D. Cole; Oliver H. Heckl

doi:10.1364/CLEO_SI.2023.SM4H.4

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner (Korresp. Autor*in), Gar-Wing Truong, David Follman, Maximilian Prinz, Georg Winkler, Stephan Puchegger, Garrett D. Cole, Oliver H. Heckl

Fakultätszentrum für Nanostrukturforschung

Veröffentlichungen: Beitrag in Buch › Beitrag in Konferenzband › Peer Reviewed

Abstract

We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Originalsprache	Englisch
Titel	CLEO 2023, Technical Digest Series
Herausgeber (Verlag)	Optica Publishing Group
Kapitel	Advanced Optical Material Characterization (SM4H)
Seitenumfang	2
ISBN (elektronisch)	9781957171258
DOIs	https://doi.org/10.1364/CLEO_SI.2023.SM4H.4
Publikationsstatus	Veröffentlicht - 2023
Veranstaltung	CLEO 2023 San José - San Jose McEnery Convention Center, San Jose, USA / Vereinigte Staaten Dauer: 7 Mai 2023 → 12 Mai 2023 https://www.cleoconference.org/home/

Konferenz

Konferenz	CLEO 2023 San José
Land/Gebiet	USA / Vereinigte Staaten
Ort	San Jose
Zeitraum	7/05/23 → 12/05/23
Internetadresse	https://www.cleoconference.org/home/

ÖFOS 2012

103021 Optik
103040 Photonik
104026 Spektroskopie
103042 Elektronenmikroskopie

Zugriff auf Dokument

10.1364/CLEO_SI.2023.SM4H.4

1 Abgeschlossen

CDL Mid-IR: CD-Labor für Mid-IR Spektroskopie und Halbleiter Optik
Heckl, O. H. & Simon, Y.
1/01/17 → 29/02/24
Projekt: Forschungskooperation

3 Vortrag
1 Teilnahme an ...

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Lukas W. Perner (Vortragende*r), Gar-Wing Truong (Autor*in), David Follman (Autor*in), Maximilian Prinz (Autor*in), Georg Winkler (Autor*in), Stephan Puchegger (Autor*in), Garrett D. Cole (Autor*in) & Oliver H. Heckl (Autor*in)
29 Juni 2023
Aktivität: Vorträge › Vortrag › Science to Science
Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse
Gar-Wing Truong (Vortragende*r), Lukas W. Perner (Autor*in), Georg Winkler (Autor*in), Seth B. Cataño-Lopez (Autor*in), Catherine Nguyen (Autor*in), David Follman (Autor*in), Oliver H. Heckl (Autor*in) & Garrett D. Cole (Autor*in)
11 Mai 2023
Aktivität: Vorträge › Vortrag › Science to Science
High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Lukas Perner (Autor*in), Gar-Wing Truong (Autor*in), David Follman (Autor*in), Maximilian Prinz (Autor*in), Georg Winkler (Autor*in), Stephan Puchegger (Autor*in), Garrett D. Cole (Autor*in) & Oliver H. Heckl (Vortragende*r)
8 Mai 2023
Aktivität: Vorträge › Vortrag › Science to Science

4 Beitrag in Konferenzband
2 Sonstiger Konferenzbeitrag
2 Artikel
1 Patentschrift

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W., Truong, G-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D. & Heckl, O. H., 26 Juni 2023, 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). IEEE
Veröffentlichungen: Beitrag in Buch › Beitrag in Konferenzband › Peer Reviewed
Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse
Truong, G-W., Perner, L. W., Winkler, G., Cataño-Lopez, S. B., Nguyen, C., Follman, D., Heckl, O. H. & Cole, G. D., 2023, CLEO 2023. Optica Publishing Group, 2 S. STh1H.2. (OSA Technical Digest Series).
Veröffentlichungen: Beitrag in Buch › Beitrag in Konferenzband › Peer Reviewed
Simultaneous measurement of mid-infrared refractive indices in thin-film heterostructures: Methodology and results for GaAs/AlGaAs
Titel in Übersetzung: Gleichzeitige Messung der Brechungsindizes im mittleren Infrarotbereich in Dünnschicht-Heterostrukturen: Methodik und Ergebnisse für GaAs/AlGaAsPerner, L. W., Truong, G-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D. & Heckl, O. H., 25 Juli 2023, in: Physical Review Research. 5, 3, 9 S., 033048.
Veröffentlichungen: Beitrag in Fachzeitschrift › Artikel › Peer Reviewed

Open Access

Zitationsweisen

@inproceedings{d330981dcec2473bbe60e8a2e7d9bc53,

title = "High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures",

abstract = "We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.",

keywords = "Distributed Bragg reflectors, Gallium Arsenide, Optical devices, Refractive index, Scanning electron microscopy",

author = "Perner, {Lukas W.} and Gar-Wing Truong and David Follman and Maximilian Prinz and Georg Winkler and Stephan Puchegger and Cole, {Garrett D.} and Heckl, {Oliver H.}",

year = "2023",

doi = "10.1364/CLEO_SI.2023.SM4H.4",

language = "English",

booktitle = "CLEO 2023, Technical Digest Series",

publisher = "Optica Publishing Group",

note = "CLEO 2023 San Jos{\'e} ; Conference date: 07-05-2023 Through 12-05-2023",

url = "https://www.cleoconference.org/home/",

}

Perner, LW, Truong, G-W, Follman, D, Prinz, M, Winkler, G, Puchegger, S, Cole, GD & Heckl, OH 2023, High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures. in CLEO 2023, Technical Digest Series., SM4H.4, Optica Publishing Group, CLEO 2023 San José, San Jose, California, USA / Vereinigte Staaten, 7/05/23. https://doi.org/10.1364/CLEO_SI.2023.SM4H.4

TY - GEN

T1 - High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

AU - Perner, Lukas W.

AU - Truong, Gar-Wing

AU - Follman, David

AU - Prinz, Maximilian

AU - Winkler, Georg

AU - Puchegger, Stephan

AU - Cole, Garrett D.

AU - Heckl, Oliver H.

PY - 2023

Y1 - 2023

N2 - We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

AB - We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

KW - Distributed Bragg reflectors

KW - Gallium Arsenide

KW - Optical devices

KW - Refractive index

KW - Scanning electron microscopy

U2 - 10.1364/CLEO_SI.2023.SM4H.4

DO - 10.1364/CLEO_SI.2023.SM4H.4

M3 - Contribution to proceedings

BT - CLEO 2023, Technical Digest Series

PB - Optica Publishing Group

T2 - CLEO 2023 San José

Y2 - 7 May 2023 through 12 May 2023

ER -

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Abstract

Konferenz

ÖFOS 2012

Zugriff auf Dokument

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Projekte

CDL Mid-IR: CD-Labor für Mid-IR Spektroskopie und Halbleiter Optik

Aktivitäten

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse