High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Lukas W. Perner; Georg Winkler; Gar-Wing Truong; David Follman; Jakob Fellinger; Maximilian Prinz; Stephan Puchegger; Garrett D. Cole; Oliver H. Heckl

doi:10.1364/OIC.2022.WA.5

High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Lukas W. Perner (Korresp. Autor*in)
, Georg Winkler
, Gar-Wing Truong
, David Follman
, Jakob Fellinger
, Maximilian Prinz
, Stephan Puchegger
, Garrett D. Cole
, Oliver H. Heckl

Fakultätszentrum für Nanostrukturforschung

Veröffentlichungen: Beitrag in Buch › Beitrag in Konferenzband › Peer Reviewed

Abstract

We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Originalsprache	Englisch
Titel	Optical Interference Coatings Conference (OIC) 2022
Untertitel	Vancouver, British Columbia Canada 19–24 June 2022
Redakteure*innen	R. Sargent, A. Sytchkova
Verlag	Optica Publishing Group
Seitenumfang	3
ISBN (elektronisch)	978-1-957171-04-3
DOIs	https://doi.org/10.1364/OIC.2022.WA.5
Publikationsstatus	Veröffentlicht - 2022
Veranstaltung	Optical Interference Coatings Conference - Whistler Conference Centre, Whistler, Kanada Dauer: 19 Juni 2022 → 24 Juni 2022 https://www.optica.org/en-us/events/topical_meetings/optical_interference_coatings/

Konferenz

Konferenz	Optical Interference Coatings Conference
Kurztitel	OIC 2022
Land/Gebiet	Kanada
Ort	Whistler
Zeitraum	19/06/22 → 24/06/22
Internetadresse	https://www.optica.org/en-us/events/topical_meetings/optical_interference_coatings/

ÖFOS 2012

103021 Optik
205002 Beschichtungstechnik
103040 Photonik
104026 Spektroskopie

Zugriff auf Dokument

10.1364/OIC.2022.WA.5

1 Abgeschlossen

CDL Mid-IR: CD-Labor für Mid-IR Spektroskopie und Halbleiter Optik
Heckl, O. H. (Projektleiter*in) & Simon, Y. (Projektadministrator*in)
1/01/17 → 29/02/24
Projekt: Forschungskooperation

6 Vortrag
4 Teilnahme an ...
3 Posterpräsentation

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W. (Vortragende*r), Truong, G.-W. (Autor*in), Follman, D. (Autor*in), Prinz, M. (Autor*in), Winkler, G. (Autor*in), Puchegger, S. (Autor*in), Cole, G. D. (Autor*in) & Heckl, O. H. (Autor*in)
29 Juni 2023
Aktivität: Vorträge › Vortrag › Science to Science
Laser World of Photonics 2023
Perner, L. (Teilnehmer*in), Prinz, M. (Teilnehmer*in) & Galander, U. (Teilnehmer*in)
27 Juni 2023 → 30 Juni 2023
Aktivität: Wissenschaftliche Veranstaltungen › Teilnahme an ...
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023)
Perner, L. (Teilnehmer*in), Heckl, O. H. (Teilnehmer*in), Prinz, M. (Teilnehmer*in) & Galander, U. (Teilnehmer*in)
26 Juni 2023 → 30 Juni 2023
Aktivität: Wissenschaftliche Veranstaltungen › Teilnahme an ...

4 Beitrag in Konferenzband
2 Sonstiger Konferenzbeitrag
2 Artikel
1 Patentschrift

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W. (Korresp. Autor*in), Truong, G.-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D. & Heckl, O. H., 2023, CLEO 2023, Technical Digest Series. Optica Publishing Group, 2 S. SM4H.4
Veröffentlichungen: Beitrag in Buch › Beitrag in Konferenzband › Peer Reviewed
High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W. (Korresp. Autor*in), Truong, G.-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D. & Heckl, O. H., 26 Juni 2023, 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). IEEE
Veröffentlichungen: Beitrag in Buch › Beitrag in Konferenzband › Peer Reviewed
Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse
Truong, G.-W., Perner, L. W., Winkler, G., Cataño-Lopez, S. B., Nguyen, C., Follman, D., Heckl, O. H. & Cole, G. D., 2023, CLEO 2023. Optica Publishing Group, 2 S. STh1H.2. (OSA Technical Digest Series).
Veröffentlichungen: Beitrag in Buch › Beitrag in Konferenzband › Peer Reviewed

Zitationsweisen

Perner, L. W., Winkler, G., Truong, G.-W., Follman, D., Fellinger, J., Prinz, M., Puchegger, S., Cole, G. D., & Heckl, O. H. (2022). High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers. in R. Sargent, & A. Sytchkova (Hrsg.), Optical Interference Coatings Conference (OIC) 2022: Vancouver, British Columbia Canada 19–24 June 2022 Artikel WA.5 Optica Publishing Group. https://doi.org/10.1364/OIC.2022.WA.5

@inproceedings{7d4010124c754b7d820cb11e9eb5be7f,

title = "High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers",

abstract = "We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.",

keywords = "Multilayers, Optical devices, Refractive index, Scanning electron microscopy, Thin film optical properties",

author = "Perner, \{Lukas W.\} and Georg Winkler and Gar-Wing Truong and David Follman and Jakob Fellinger and Maximilian Prinz and Stephan Puchegger and Cole, \{Garrett D.\} and Heckl, \{Oliver H.\}",

year = "2022",

doi = "10.1364/OIC.2022.WA.5",

language = "English",

editor = "R. Sargent and A. Sytchkova",

booktitle = "Optical Interference Coatings Conference (OIC) 2022",

publisher = "Optica Publishing Group",

note = "Optical Interference Coatings Conference, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",

url = "https://www.optica.org/en-us/events/topical\_meetings/optical\_interference\_coatings/",

}

Perner, LW, Winkler, G, Truong, G-W, Follman, D, Fellinger, J, Prinz, M , Puchegger, S, Cole, GD & Heckl, OH 2022, High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers. in R Sargent & A Sytchkova (Hrsg.), Optical Interference Coatings Conference (OIC) 2022: Vancouver, British Columbia Canada 19–24 June 2022., WA.5, Optica Publishing Group, Optical Interference Coatings Conference, Whistler, British Columbia, Kanada, 19/06/22. https://doi.org/10.1364/OIC.2022.WA.5

High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers. / Perner, Lukas W. (Korresp. Autor*in); Winkler, Georg; Truong, Gar-Wing et al.
Optical Interference Coatings Conference (OIC) 2022: Vancouver, British Columbia Canada 19–24 June 2022. Hrsg. / R. Sargent; A. Sytchkova. Optica Publishing Group, 2022. WA.5.

Veröffentlichungen: Beitrag in Buch › Beitrag in Konferenzband › Peer Reviewed

TY - GEN

T1 - High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

AU - Perner, Lukas W.

AU - Winkler, Georg

AU - Truong, Gar-Wing

AU - Follman, David

AU - Fellinger, Jakob

AU - Prinz, Maximilian

AU - Puchegger, Stephan

AU - Cole, Garrett D.

AU - Heckl, Oliver H.

PY - 2022

Y1 - 2022

N2 - We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

AB - We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

KW - Multilayers

KW - Optical devices

KW - Refractive index

KW - Scanning electron microscopy

KW - Thin film optical properties

U2 - 10.1364/OIC.2022.WA.5

DO - 10.1364/OIC.2022.WA.5

M3 - Contribution to proceedings

BT - Optical Interference Coatings Conference (OIC) 2022

A2 - Sargent, R.

A2 - Sytchkova, A.

PB - Optica Publishing Group

T2 - Optical Interference Coatings Conference

Y2 - 19 June 2022 through 24 June 2022

ER -

Perner LW, Winkler G, Truong GW, Follman D, Fellinger J, Prinz M et al. High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers. in Sargent R, Sytchkova A, Hrsg., Optical Interference Coatings Conference (OIC) 2022: Vancouver, British Columbia Canada 19–24 June 2022. Optica Publishing Group. 2022. WA.5 doi: 10.1364/OIC.2022.WA.5

High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Abstract

Konferenz

ÖFOS 2012

Zugriff auf Dokument

Fingerprint

Projekte

CDL Mid-IR: CD-Labor für Mid-IR Spektroskopie und Halbleiter Optik

Aktivitäten

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Laser World of Photonics 2023

2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023)

Publikationen

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse

Zitationsweisen