High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner (Korresp. Autor*in), Gar-Wing Truong, David Follman, Maximilian Prinz, Georg Winkler, Stephan Puchegger, Garrett D. Cole, Oliver H. Heckl

Veröffentlichungen: Beitrag in BuchBeitrag in KonferenzbandPeer Reviewed

Abstract

Accurate knowledge of the refractive index, n, of optical materials is required for the development of many optical devices in the visible (VIS), near- (NIR) and mid-infrared (MIR) spectral regions, such as lasers, light-emitting and super-luminescent diodes, and distributed Bragg reflectors (DBRs). Typically, n shows a variability depending on deposition conditions, which motivates the need for routine characterization of as-produced structures. While several measurement methods for n exist, among them (spectroscopic) ellipsometry and Fourier-transform infrared (FTIR) refractometry, they all come with their (dis-)advantages, e.g., accurate goniometric measurements or high-resolution FTIR [1].

OriginalspracheEnglisch
Titel2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)
Herausgeber (Verlag)IEEE
ISBN (elektronisch)9798350345995
DOIs
PublikationsstatusVeröffentlicht - 26 Juni 2023
Veranstaltung2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023) - International Congress Centre Munich (Munich ICM), Munich, Deutschland
Dauer: 26 Juni 202330 Juni 2023
https://www.cleoeurope.org/

Konferenz

Konferenz2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023)
KurztitelCLEO/Europe-EQEC 2023
Land/GebietDeutschland
OrtMunich
Zeitraum26/06/2330/06/23
Internetadresse

ÖFOS 2012

  • 104026 Spektroskopie
  • 103021 Optik
  • 103018 Materialphysik
  • 205019 Materialwissenschaften

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