TY - JOUR
T1 - Roadmap for focused ion beam technologies
AU - Höflich, Katja
AU - Hobler, Gerhard
AU - Allen, Frances I.
AU - Wirtz, Tom
AU - Rius, Gemma
AU - McElwee-White, Lisa
AU - Krasheninnikov, Arkady V.
AU - Schmidt, Matthias
AU - Utke, Ivo
AU - Klingner, Nico
AU - Osenberg, Markus
AU - Córdoba, Rosa
AU - Djurabekova, Flyura
AU - Manke, Ingo
AU - Moll, Philip
AU - Manoccio, Mariachiara
AU - De Teresa, José María
AU - Bischoff, Lothar
AU - Michler, Johann
AU - De Castro, Olivier
AU - Delobbe, Anne
AU - Dunne, Peter
AU - Dobrovolskiy, Oleksandr V.
AU - Frese, Natalie
AU - Gölzhäuser, Armin
AU - Mazarov, Paul
AU - Koelle, Dieter
AU - Möller, Wolfhard
AU - Pérez-Murano, Francesc
AU - Philipp, Patrick
AU - Vollnhals, Florian
AU - Hlawacek, Gregor
N1 - Publisher Copyright:
© 2023 Author(s).
PY - 2023/12/26
Y1 - 2023/12/26
N2 - The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.
AB - The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.
UR - https://www.scopus.com/pages/publications/85181095616
U2 - 10.1063/5.0162597
DO - 10.1063/5.0162597
M3 - Review
AN - SCOPUS:85181095616
SN - 1931-9401
VL - 10
JO - Applied Physics Reviews
JF - Applied Physics Reviews
IS - 4
M1 - 041311
ER -