High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

  • Lukas Perner (Contributor)
  • Gar-Wing Truong (Contributor)
  • David Follman (Contributor)
  • Prinz, M. (Contributor)
  • Georg Winkler (Contributor)
  • Puchegger, S. (Contributor)
  • Garrett D. Cole (Contributor)
  • Heckl, O. H. (Speaker)

Activity: Talks and presentationsTalk or oral contributionScience to Science


We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.
Period8 May 2023
Event titleCLEO 2023 San José
Event typeConference
LocationSan Jose, United States, CaliforniaShow on map
Degree of RecognitionInternational


  • Distributed Bragg reflectors
  • Gallium arsenide
  • Optical devices
  • Refractive index
  • Scanning electron microscopy