High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

  • Lukas W. Perner (Contributor)
  • Georg Winkler (Contributor)
  • Gar-Wing Truong (Contributor)
  • David Follman (Contributor)
  • Jakob Fellinger (Contributor)
  • Prinz, M. (Contributor)
  • Puchegger, S. (Contributor)
  • Garrett D. Cole (Contributor)
  • Heckl, O. H. (Speaker)

Activity: Talks and presentations › Poster presentation › Science to Science

Description

We report a method to measure the refractive index of two or more materials in
as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.
Period15 Jun 2022
Event titleCavity Enhanced Spectroscopy 2022
Event typeConference
LocationLecco, ItalyShow on map
Degree of RecognitionInternational

Related content