High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

  • Lukas W. Perner (Speaker)
  • Georg Winkler (Contributor)
  • Gar-Wing Truong (Contributor)
  • David Follman (Contributor)
  • Jakob Fellinger (Contributor)
  • Prinz, M. (Contributor)
  • Puchegger, S. (Contributor)
  • Garrett D. Cole (Contributor)
  • Heckl, O. H. (Contributor)

Activity: Talks and presentations › Talk or oral contribution › Science to Science

Description

We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.
Period22 Jun 2022
Event titleOptical Interference Coatings Conference
Event typeConference
LocationWhistler, Canada, British ColumbiaShow on map
Degree of RecognitionInternational

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