High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

  • Lukas W. Perner (Speaker)
  • Gar-Wing Truong (Contributor)
  • David Follman (Contributor)
  • Prinz, M. (Contributor)
  • Georg Winkler (Contributor)
  • Puchegger, S. (Contributor)
  • Garrett D. Cole (Contributor)
  • Heckl, O. H. (Contributor)

Activity: Talks and presentationsTalk or oral contributionScience to Science


We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.
Period29 Jun 2023
Event title2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023)
Event typeConference
LocationMunich, GermanyShow on map
Degree of RecognitionInternational


  • Distributed Bragg reflectors
  • Crystalline mirrors
  • Metrology
  • Refractive index
  • Refraction
  • Multilayer thin films
  • Optical materials
  • Optical devices
  • Electron microscopy
  • Optical spectroscopy
  • Optical techniques
  • Spectroscopy