Deep learning for electron and scanning probe microscopy: From materials design to atomic fabrication

Sergei Kalinin (Corresponding author), Maxim Ziatdinov, Steven R. Spurgeon, Colin Ophus, Eric A. Stach, Toma Susi, Josh Agar, John Randall

Publications: Contribution to journalArticlePeer Reviewed

Abstract

Machine learning and artificial intelligence (ML/AI) are rapidly becoming an indispensable part of physics research, with applications ranging from theory and materials prediction to high-throughput data analysis. In parallel, the recent successes in applying ML/AI methods for autonomous systems from robotics through self-driving cars to organic and inorganic synthesis are generating enthusiasm for the potential of these techniques to enable automated and autonomous experiment in imaging. In this article, we discuss recent progress in application of machine learning methods in scanning transmission electron microscopy and scanning probe microscopy, from applications such as data compression and exploratory data analysis to physics learning to atomic fabrication.

Original languageEnglish
Pages (from-to)931-939
Number of pages9
JournalMRS Bulletin
Volume47
Issue number9
DOIs
Publication statusPublished - Sept 2022

Austrian Fields of Science 2012

  • 103018 Materials physics

Keywords

  • ABERRATION CORRECTION
  • SINGLE ATOMS
  • SCALE
  • LITHOGRAPHY
  • ROBUST
  • Scanning transmission electron microscopy (STEM)
  • Autonomous
  • Artificial intelligence
  • Scanning probe microscopy (SPM)

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