Generating Multimode Entangled Microwaves with a Superconducting Parametric Cavity

Funding

We thank B. Plourde, J.J. Nelson, and M. Hutchings at Syracuse University for invaluable help in junction fabrication. We also acknowledge M. Piani for helpful discussions. C.M.W., C.W.S.C., P.F.-D., and A.M.V. acknowledge NSERC of Canada, the Canadian Foundation for Innovation, the Ontario Ministry of Research and Innovation, Canada First Research Excellence Fund, Industry Canada, and the CMC for financial support. C.S. acknowledges financial support by Fundacion General CSIC (Programa ComFuturo), MINECO/FEDER Grant No. FIS2015-70856-P, and CAM PRICYT Project QUITEMAD+ Grant No. S2013/ICE-2801. I.F. acknowledges EPSRC (Career Acceleration Fellowship Grant No. EP/G00496X/2). F.Q. and G.J. acknowledge the Knut and Alice Wallenberg Foundation for funding.