High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner (Corresponding author), Gar-Wing Truong, David Follman, Maximilian Prinz, Georg Winkler, Stephan Puchegger, Garrett D. Cole, Oliver H. Heckl

Publications: Contribution to bookContribution to proceedingsPeer Reviewed

Abstract

We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.
Original languageEnglish
Title of host publicationCLEO 2023, Technical Digest Series
PublisherOptica Publishing Group
ChapterAdvanced Optical Material Characterization (SM4H)
Number of pages2
ISBN (Electronic)9781957171258
DOIs
Publication statusPublished - 2023
EventCLEO 2023 San José - San Jose McEnery Convention Center, San Jose, United States
Duration: 7 May 202312 May 2023
https://www.cleoconference.org/home/

Conference

ConferenceCLEO 2023 San José
Country/TerritoryUnited States
CitySan Jose
Period7/05/2312/05/23
Internet address

Austrian Fields of Science 2012

  • 103021 Optics
  • 103040 Photonics
  • 104026 Spectroscopy
  • 103042 Electron microscopy

Keywords

  • Distributed Bragg reflectors
  • Gallium Arsenide
  • Optical devices
  • Refractive index
  • Scanning electron microscopy

Cite this