High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner; Gar-Wing Truong; David Follman; Maximilian Prinz; Georg Winkler; Stephan Puchegger; Garrett D. Cole; Oliver H. Heckl

doi:10.1364/CLEO_SI.2023.SM4H.4

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner (Corresponding author)
, Gar-Wing Truong
, David Follman
, Maximilian Prinz
, Georg Winkler
, Stephan Puchegger
, Garrett D. Cole
, Oliver H. Heckl

Faculty Center for Nano Structure Research

Publications: Contribution to book › Contribution to proceedings › Peer Reviewed

Abstract

We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Original language	English
Title of host publication	CLEO 2023, Technical Digest Series
Publisher	Optica Publishing Group
Chapter	Advanced Optical Material Characterization (SM4H)
Number of pages	2
ISBN (Electronic)	9781957171258
DOIs	https://doi.org/10.1364/CLEO_SI.2023.SM4H.4
Publication status	Published - 2023
Event	CLEO 2023 San José - San Jose McEnery Convention Center, San Jose, United States Duration: 7 May 2023 → 12 May 2023 https://www.cleoconference.org/home/

Conference

Conference	CLEO 2023 San José
Country/Territory	United States
City	San Jose
Period	7/05/23 → 12/05/23
Internet address	https://www.cleoconference.org/home/

Austrian Fields of Science 2012

103021 Optics
103040 Photonics
104026 Spectroscopy
103042 Electron microscopy

Keywords

Distributed Bragg reflectors
Gallium Arsenide
Optical devices
Refractive index
Scanning electron microscopy

Access to Document

10.1364/CLEO_SI.2023.SM4H.4

1 Finished

CDL Mid-IR: Christian Doppler Laboratory for Mid-IR Spectroscopy and Semiconductor Optics
Heckl, O. H. (Project Lead) & Simon, Y. (Admin)
1/01/17 → 29/02/24
Project: Research cooperation

3 Talk or oral contribution
1 Participation in ...

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W. (Speaker), Truong, G.-W. (Contributor), Follman, D. (Contributor), Prinz, M. (Contributor), Winkler, G. (Contributor), Puchegger, S. (Contributor), Cole, G. D. (Contributor) & Heckl, O. H. (Contributor)
29 Jun 2023
Activity: Talks and presentations › Talk or oral contribution › Science to Science
Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse
Truong, G.-W. (Speaker), Perner, L. W. (Contributor), Winkler, G. (Contributor), Cataño-Lopez, S. B. (Contributor), Nguyen, C. (Contributor), Follman, D. (Contributor), Heckl, O. H. (Contributor) & Cole, G. D. (Contributor)
11 May 2023
Activity: Talks and presentations › Talk or oral contribution › Science to Science
High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. (Contributor), Truong, G.-W. (Contributor), Follman, D. (Contributor), Prinz, M. (Contributor), Winkler, G. (Contributor), Puchegger, S. (Contributor), Cole, G. D. (Contributor) & Heckl, O. H. (Speaker)
8 May 2023
Activity: Talks and presentations › Talk or oral contribution › Science to Science

4 Contribution to proceedings
2 Other contribution to conference
2 Article
1 Patent

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W. (Corresponding author), Truong, G.-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D. & Heckl, O. H., 26 Jun 2023, 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). IEEE
Publications: Contribution to book › Contribution to proceedings › Peer Reviewed
Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse
Truong, G.-W., Perner, L. W., Winkler, G., Cataño-Lopez, S. B., Nguyen, C., Follman, D., Heckl, O. H. & Cole, G. D., 2023, CLEO 2023. Optica Publishing Group, 2 p. STh1H.2. (OSA Technical Digest Series).
Publications: Contribution to book › Contribution to proceedings › Peer Reviewed
Simultaneous measurement of mid-infrared refractive indices in thin-film heterostructures: Methodology and results for GaAs/AlGaAs
Perner, L. W. (Corresponding author), Truong, G.-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D. & Heckl, O. H., 25 Jul 2023, In: Physical Review Research. 5, 3, 9 p., 033048.
Publications: Contribution to journal › Article › Peer Reviewed

Open Access

Cite this

@inproceedings{d330981dcec2473bbe60e8a2e7d9bc53,

title = "High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures",

abstract = "We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.",

keywords = "Distributed Bragg reflectors, Gallium Arsenide, Optical devices, Refractive index, Scanning electron microscopy",

author = "Perner, \{Lukas W.\} and Gar-Wing Truong and David Follman and Maximilian Prinz and Georg Winkler and Stephan Puchegger and Cole, \{Garrett D.\} and Heckl, \{Oliver H.\}",

year = "2023",

doi = "10.1364/CLEO\_SI.2023.SM4H.4",

language = "English",

booktitle = "CLEO 2023, Technical Digest Series",

publisher = "Optica Publishing Group",

note = "CLEO 2023 San Jos{\'e} ; Conference date: 07-05-2023 Through 12-05-2023",

url = "https://www.cleoconference.org/home/",

}

Perner, LW, Truong, G-W, Follman, D, Prinz, M, Winkler, G, Puchegger, S, Cole, GD & Heckl, OH 2023, High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures. in CLEO 2023, Technical Digest Series., SM4H.4, Optica Publishing Group, CLEO 2023 San José, San Jose, California, United States, 7/05/23. https://doi.org/10.1364/CLEO_SI.2023.SM4H.4

TY - GEN

T1 - High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

AU - Perner, Lukas W.

AU - Truong, Gar-Wing

AU - Follman, David

AU - Prinz, Maximilian

AU - Winkler, Georg

AU - Puchegger, Stephan

AU - Cole, Garrett D.

AU - Heckl, Oliver H.

PY - 2023

Y1 - 2023

N2 - We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

AB - We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

KW - Distributed Bragg reflectors

KW - Gallium Arsenide

KW - Optical devices

KW - Refractive index

KW - Scanning electron microscopy

U2 - 10.1364/CLEO_SI.2023.SM4H.4

DO - 10.1364/CLEO_SI.2023.SM4H.4

M3 - Contribution to proceedings

BT - CLEO 2023, Technical Digest Series

PB - Optica Publishing Group

T2 - CLEO 2023 San José

Y2 - 7 May 2023 through 12 May 2023

ER -

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Abstract

Conference

Austrian Fields of Science 2012

Keywords

Access to Document

Fingerprint

Projects

CDL Mid-IR: Christian Doppler Laboratory for Mid-IR Spectroscopy and Semiconductor Optics

Activities

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse