High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Lukas W. Perner; Georg Winkler; Gar-Wing Truong; David Follman; Jakob Fellinger; Maximilian Prinz; Stephan Puchegger; Garrett D. Cole; Oliver H. Heckl

doi:10.1364/OIC.2022.WA.5

High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Lukas W. Perner (Corresponding author)
, Georg Winkler
, Gar-Wing Truong
, David Follman
, Jakob Fellinger
, Maximilian Prinz
, Stephan Puchegger
, Garrett D. Cole
, Oliver H. Heckl

Faculty Center for Nano Structure Research

Publications: Contribution to book › Contribution to proceedings › Peer Reviewed

Abstract

We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Original language	English
Title of host publication	Optical Interference Coatings Conference (OIC) 2022
Subtitle of host publication	Vancouver, British Columbia Canada 19–24 June 2022
Editors	R. Sargent, A. Sytchkova
Publisher	Optica Publishing Group
Number of pages	3
ISBN (Electronic)	978-1-957171-04-3
DOIs	https://doi.org/10.1364/OIC.2022.WA.5
Publication status	Published - 2022
Event	Optical Interference Coatings Conference - Whistler Conference Centre, Whistler, Canada Duration: 19 Jun 2022 → 24 Jun 2022 https://www.optica.org/en-us/events/topical_meetings/optical_interference_coatings/

Conference

Conference	Optical Interference Coatings Conference
Abbreviated title	OIC 2022
Country/Territory	Canada
City	Whistler
Period	19/06/22 → 24/06/22
Internet address	https://www.optica.org/en-us/events/topical_meetings/optical_interference_coatings/

Austrian Fields of Science 2012

103021 Optics
205002 Coating technology
103040 Photonics
104026 Spectroscopy

Keywords

Multilayers
Optical devices
Refractive index
Scanning electron microscopy
Thin film optical properties

Access to Document

10.1364/OIC.2022.WA.5

1 Finished

CDL Mid-IR: Christian Doppler Laboratory for Mid-IR Spectroscopy and Semiconductor Optics
Heckl, O. H. (Project Lead) & Simon, Y. (Admin)
1/01/17 → 29/02/24
Project: Research cooperation

6 Talk or oral contribution
4 Participation in ...
3 Poster presentation

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W. (Speaker), Truong, G.-W. (Contributor), Follman, D. (Contributor), Prinz, M. (Contributor), Winkler, G. (Contributor), Puchegger, S. (Contributor), Cole, G. D. (Contributor) & Heckl, O. H. (Contributor)
29 Jun 2023
Activity: Talks and presentations › Talk or oral contribution › Science to Science
Laser World of Photonics 2023
Perner, L. (Participant), Prinz, M. (Participant) & Galander, U. (Participant)
27 Jun 2023 → 30 Jun 2023
Activity: Academic events › Participation in ...
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023)
Perner, L. (Participant), Heckl, O. H. (Participant), Prinz, M. (Participant) & Galander, U. (Participant)
26 Jun 2023 → 30 Jun 2023
Activity: Academic events › Participation in ...

4 Contribution to proceedings
2 Other contribution to conference
2 Article
1 Patent

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W. (Corresponding author), Truong, G.-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D. & Heckl, O. H., 2023, CLEO 2023, Technical Digest Series. Optica Publishing Group, 2 p. SM4H.4
Publications: Contribution to book › Contribution to proceedings › Peer Reviewed
High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures
Perner, L. W. (Corresponding author), Truong, G.-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D. & Heckl, O. H., 26 Jun 2023, 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). IEEE
Publications: Contribution to book › Contribution to proceedings › Peer Reviewed
Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse
Truong, G.-W., Perner, L. W., Winkler, G., Cataño-Lopez, S. B., Nguyen, C., Follman, D., Heckl, O. H. & Cole, G. D., 2023, CLEO 2023. Optica Publishing Group, 2 p. STh1H.2. (OSA Technical Digest Series).
Publications: Contribution to book › Contribution to proceedings › Peer Reviewed

Cite this

Perner, L. W., Winkler, G., Truong, G.-W., Follman, D., Fellinger, J., Prinz, M., Puchegger, S., Cole, G. D., & Heckl, O. H. (2022). High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers. In R. Sargent, & A. Sytchkova (Eds.), Optical Interference Coatings Conference (OIC) 2022: Vancouver, British Columbia Canada 19–24 June 2022 Article WA.5 Optica Publishing Group. https://doi.org/10.1364/OIC.2022.WA.5

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title = "High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers",

abstract = "We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.",

keywords = "Multilayers, Optical devices, Refractive index, Scanning electron microscopy, Thin film optical properties",

author = "Perner, \{Lukas W.\} and Georg Winkler and Gar-Wing Truong and David Follman and Jakob Fellinger and Maximilian Prinz and Stephan Puchegger and Cole, \{Garrett D.\} and Heckl, \{Oliver H.\}",

year = "2022",

doi = "10.1364/OIC.2022.WA.5",

language = "English",

editor = "R. Sargent and A. Sytchkova",

booktitle = "Optical Interference Coatings Conference (OIC) 2022",

publisher = "Optica Publishing Group",

note = "Optical Interference Coatings Conference, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",

url = "https://www.optica.org/en-us/events/topical\_meetings/optical\_interference\_coatings/",

}

Perner, LW, Winkler, G, Truong, G-W, Follman, D, Fellinger, J, Prinz, M , Puchegger, S, Cole, GD & Heckl, OH 2022, High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers. in R Sargent & A Sytchkova (eds), Optical Interference Coatings Conference (OIC) 2022: Vancouver, British Columbia Canada 19–24 June 2022., WA.5, Optica Publishing Group, Optical Interference Coatings Conference, Whistler, British Columbia, Canada, 19/06/22. https://doi.org/10.1364/OIC.2022.WA.5

High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers. / Perner, Lukas W. (Corresponding author); Winkler, Georg; Truong, Gar-Wing et al.
Optical Interference Coatings Conference (OIC) 2022: Vancouver, British Columbia Canada 19–24 June 2022. ed. / R. Sargent; A. Sytchkova. Optica Publishing Group, 2022. WA.5.

Publications: Contribution to book › Contribution to proceedings › Peer Reviewed

TY - GEN

T1 - High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

AU - Perner, Lukas W.

AU - Winkler, Georg

AU - Truong, Gar-Wing

AU - Follman, David

AU - Fellinger, Jakob

AU - Prinz, Maximilian

AU - Puchegger, Stephan

AU - Cole, Garrett D.

AU - Heckl, Oliver H.

PY - 2022

Y1 - 2022

N2 - We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

AB - We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

KW - Multilayers

KW - Optical devices

KW - Refractive index

KW - Scanning electron microscopy

KW - Thin film optical properties

U2 - 10.1364/OIC.2022.WA.5

DO - 10.1364/OIC.2022.WA.5

M3 - Contribution to proceedings

BT - Optical Interference Coatings Conference (OIC) 2022

A2 - Sargent, R.

A2 - Sytchkova, A.

PB - Optica Publishing Group

T2 - Optical Interference Coatings Conference

Y2 - 19 June 2022 through 24 June 2022

ER -

Perner LW, Winkler G, Truong GW, Follman D, Fellinger J, Prinz M et al. High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers. In Sargent R, Sytchkova A, editors, Optical Interference Coatings Conference (OIC) 2022: Vancouver, British Columbia Canada 19–24 June 2022. Optica Publishing Group. 2022. WA.5 doi: 10.1364/OIC.2022.WA.5

High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Abstract

Conference

Austrian Fields of Science 2012

Keywords

Access to Document

Fingerprint

Projects

CDL Mid-IR: Christian Doppler Laboratory for Mid-IR Spectroscopy and Semiconductor Optics

Activities

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Laser World of Photonics 2023

2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023)

Research output

High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Mid-Infrared Crystalline Supermirrors for Optical Cavities with 231 000 Finesse

Cite this