High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner; Gar-Wing Truong; David Follman; Maximilian Prinz; Georg Winkler; Stephan Puchegger; Garrett D. Cole; Oliver H. Heckl

doi:10.1109/CLEO/Europe-EQEC57999.2023.10232458

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Lukas W. Perner (Corresponding author)
, Gar-Wing Truong
, David Follman
, Maximilian Prinz
, Georg Winkler
, Stephan Puchegger
, Garrett D. Cole
, Oliver H. Heckl

Faculty Center for Nano Structure Research

Publications: Contribution to book › Contribution to proceedings › Peer Reviewed

Abstract

Accurate knowledge of the refractive index, n, of optical materials is required for the development of many optical devices in the visible (VIS), near- (NIR) and mid-infrared (MIR) spectral regions, such as lasers, light-emitting and super-luminescent diodes, and distributed Bragg reflectors (DBRs). Typically, n shows a variability depending on deposition conditions, which motivates the need for routine characterization of as-produced structures. While several measurement methods for n exist, among them (spectroscopic) ellipsometry and Fourier-transform infrared (FTIR) refractometry, they all come with their (dis-)advantages, e.g., accurate goniometric measurements or high-resolution FTIR [1].

Original language	English
Title of host publication	2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)
Publisher	IEEE
ISBN (Electronic)	9798350345995
DOIs	https://doi.org/10.1109/CLEO/Europe-EQEC57999.2023.10232458
Publication status	Published - 26 Jun 2023
Event	2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023) - International Congress Centre Munich (Munich ICM), Munich, Germany Duration: 26 Jun 2023 → 30 Jun 2023 https://www.cleoeurope.org/

Conference

Conference	2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023)
Abbreviated title	CLEO/Europe-EQEC 2023
Country/Territory	Germany
City	Munich
Period	26/06/23 → 30/06/23
Internet address	https://www.cleoeurope.org/

Austrian Fields of Science 2012

104026 Spectroscopy
103021 Optics
103018 Materials physics
205019 Material sciences

Access to Document

10.1109/CLEO/Europe-EQEC57999.2023.10232458

Cite this

Perner, L. W., Truong, G.-W., Follman, D., Prinz, M., Winkler, G., Puchegger, S., Cole, G. D., & Heckl, O. H. (2023). High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures. In 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) IEEE. https://doi.org/10.1109/CLEO/Europe-EQEC57999.2023.10232458

@inproceedings{a25f88ae932d4c6db1772ebe6e0b8016,

title = "High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures",

abstract = "Accurate knowledge of the refractive index, n, of optical materials is required for the development of many optical devices in the visible (VIS), near- (NIR) and mid-infrared (MIR) spectral regions, such as lasers, light-emitting and super-luminescent diodes, and distributed Bragg reflectors (DBRs). Typically, n shows a variability depending on deposition conditions, which motivates the need for routine characterization of as-produced structures. While several measurement methods for n exist, among them (spectroscopic) ellipsometry and Fourier-transform infrared (FTIR) refractometry, they all come with their (dis-)advantages, e.g., accurate goniometric measurements or high-resolution FTIR [1].",

author = "Perner, \{Lukas W.\} and Gar-Wing Truong and David Follman and Maximilian Prinz and Georg Winkler and Stephan Puchegger and Cole, \{Garrett D.\} and Heckl, \{Oliver H.\}",

year = "2023",

month = jun,

day = "26",

doi = "10.1109/CLEO/Europe-EQEC57999.2023.10232458",

language = "English",

booktitle = "2023 Conference on Lasers and Electro-Optics Europe \& European Quantum Electronics Conference (CLEO/Europe-EQEC)",

publisher = "IEEE",

note = "2023 Conference on Lasers and Electro-Optics Europe \& European Quantum Electronics Conference (CLEO/Europe-EQEC 2023), CLEO/Europe-EQEC 2023 ; Conference date: 26-06-2023 Through 30-06-2023",

url = "https://www.cleoeurope.org/",

}

Perner, LW, Truong, G-W, Follman, D, Prinz, M, Winkler, G, Puchegger, S, Cole, GD & Heckl, OH 2023, High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures. in 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). IEEE, 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023), Munich, Germany, 26/06/23. https://doi.org/10.1109/CLEO/Europe-EQEC57999.2023.10232458

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures. / Perner, Lukas W. (Corresponding author); Truong, Gar-Wing; Follman, David et al.
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). IEEE, 2023.

Publications: Contribution to book › Contribution to proceedings › Peer Reviewed

TY - GEN

T1 - High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

AU - Perner, Lukas W.

AU - Truong, Gar-Wing

AU - Follman, David

AU - Prinz, Maximilian

AU - Winkler, Georg

AU - Puchegger, Stephan

AU - Cole, Garrett D.

AU - Heckl, Oliver H.

PY - 2023/6/26

Y1 - 2023/6/26

N2 - Accurate knowledge of the refractive index, n, of optical materials is required for the development of many optical devices in the visible (VIS), near- (NIR) and mid-infrared (MIR) spectral regions, such as lasers, light-emitting and super-luminescent diodes, and distributed Bragg reflectors (DBRs). Typically, n shows a variability depending on deposition conditions, which motivates the need for routine characterization of as-produced structures. While several measurement methods for n exist, among them (spectroscopic) ellipsometry and Fourier-transform infrared (FTIR) refractometry, they all come with their (dis-)advantages, e.g., accurate goniometric measurements or high-resolution FTIR [1].

AB - Accurate knowledge of the refractive index, n, of optical materials is required for the development of many optical devices in the visible (VIS), near- (NIR) and mid-infrared (MIR) spectral regions, such as lasers, light-emitting and super-luminescent diodes, and distributed Bragg reflectors (DBRs). Typically, n shows a variability depending on deposition conditions, which motivates the need for routine characterization of as-produced structures. While several measurement methods for n exist, among them (spectroscopic) ellipsometry and Fourier-transform infrared (FTIR) refractometry, they all come with their (dis-)advantages, e.g., accurate goniometric measurements or high-resolution FTIR [1].

UR - https://www.scopus.com/pages/publications/85175735170

U2 - 10.1109/CLEO/Europe-EQEC57999.2023.10232458

DO - 10.1109/CLEO/Europe-EQEC57999.2023.10232458

M3 - Contribution to proceedings

BT - 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)

PB - IEEE

T2 - 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC 2023)

Y2 - 26 June 2023 through 30 June 2023

ER -

High-Accuracy Measurement of Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Abstract

Conference

Austrian Fields of Science 2012

Access to Document

Other files and links

Fingerprint

CDL Mid-IR: Christian Doppler Laboratory for Mid-IR Spectroscopy and Semiconductor Optics