@article{85f66a013c104e0992db18ae22dcda1e,
title = "High reflectivity high-Q micromechanical Bragg mirror",
abstract = "The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-P{\v Z}rot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high- Q high-finesse cavities on chip. {\OE} 2006 American Institute of Physics.",
author = "Hannes B{\"o}hm and Sylvain Gigan and Florian Blaser and Anton Zeilinger and Markus Aspelmeyer and Gregor Langer and Dieter B{\"a}uerle and Hertzberg, {Jared B.} and Schwab, {K C}",
note = "DOI: 10.1063/1.2393000 Coden: APPLA Affiliations: Faculty of Physics, University of Vienna, Boltzmanngasse 5, A-1090 Vienna, Austria; Institute for Quantum Optics and Quantum Information (IQOQI), Austrian Academy of Sciences, Boltzmanngasse 3, A-1090 Vienna, Austria; Institute for Applied Physics, Johannes-Kepler-University Linz, Altenbergerstr. 69, A-4040 Linz, Austria; Department of Physics, University of Maryland, College Park, MD 20740; Laboratory for Physical Sciences, University of Maryland, College Park, MD 20740; University of California, Berkeley, CA 94720-1740; Department of Physics, Cornell University, Ithaca, NY 14853 Adressen: B{\"o}hm, H.R.; Institute for Quantum Optics and Quantum Information (IQOQI); Austrian Academy of Sciences; Boltzmanngasse 3 A-1090 Vienna, Austria Source-File: Phys070307scopus.csv Import aus Scopus: 2-s2.0-33751556187 Importdatum: 09.03.2007 16:10:16 25.02.2008: Datenanforderung 2152 (Import Sachbearbeiter)",
year = "2006",
doi = "10.1063/1.2393000",
language = "English",
volume = "89",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "22",
}