High reflectivity high-Q micromechanical Bragg mirror

Hannes Böhm, Sylvain Gigan, Florian Blaser, Anton Zeilinger, Markus Aspelmeyer, Gregor Langer, Dieter Bäuerle, Jared B. Hertzberg, K C Schwab

    Publications: Contribution to journalArticlePeer Reviewed

    Abstract

    The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-PŽrot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high- Q high-finesse cavities on chip. Œ 2006 American Institute of Physics.
    Original languageEnglish
    Article number223101
    Number of pages3
    JournalApplied Physics Letters
    Volume89
    Issue number22
    DOIs
    Publication statusPublished - 2006

    Austrian Fields of Science 2012

    • 103008 Experimental physics

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