High reflectivity high-Q micromechanical Bragg mirror

Hannes Böhm; Sylvain Gigan; Florian Blaser; Anton Zeilinger; Markus Aspelmeyer; Gregor Langer; Dieter Bäuerle; Jared B. Hertzberg; K C Schwab

doi:10.1063/1.2393000

High reflectivity high-Q micromechanical Bragg mirror

Hannes Böhm
, Sylvain Gigan
, Florian Blaser
, Anton Zeilinger
, Markus Aspelmeyer
, Gregor Langer
, Dieter Bäuerle
, Jared B. Hertzberg
, K C Schwab

Publications: Contribution to journal › Article › Peer Reviewed

Abstract

The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-PŽrot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high- Q high-finesse cavities on chip. Œ 2006 American Institute of Physics.

Original language	English
Article number	223101
Number of pages	3
Journal	Applied Physics Letters
Volume	89
Issue number	22
DOIs	https://doi.org/10.1063/1.2393000
Publication status	Published - 2006

Austrian Fields of Science 2012

103008 Experimental physics

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10.1063/1.2393000

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title = "High reflectivity high-Q micromechanical Bragg mirror",

abstract = "The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6\%, a mass of 400 ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-P{\v Z}rot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high- Q high-finesse cavities on chip. {\OE} 2006 American Institute of Physics.",

author = "Hannes B{\"o}hm and Sylvain Gigan and Florian Blaser and Anton Zeilinger and Markus Aspelmeyer and Gregor Langer and Dieter B{\"a}uerle and Hertzberg, \{Jared B.\} and Schwab, \{K C\}",

note = "DOI: 10.1063/1.2393000 Coden: APPLA Affiliations: Faculty of Physics, University of Vienna, Boltzmanngasse 5, A-1090 Vienna, Austria; Institute for Quantum Optics and Quantum Information (IQOQI), Austrian Academy of Sciences, Boltzmanngasse 3, A-1090 Vienna, Austria; Institute for Applied Physics, Johannes-Kepler-University Linz, Altenbergerstr. 69, A-4040 Linz, Austria; Department of Physics, University of Maryland, College Park, MD 20740; Laboratory for Physical Sciences, University of Maryland, College Park, MD 20740; University of California, Berkeley, CA 94720-1740; Department of Physics, Cornell University, Ithaca, NY 14853 Adressen: B{\"o}hm, H.R.; Institute for Quantum Optics and Quantum Information (IQOQI); Austrian Academy of Sciences; Boltzmanngasse 3 A-1090 Vienna, Austria Source-File: Phys070307scopus.csv Import aus Scopus: 2-s2.0-33751556187 Importdatum: 09.03.2007 16:10:16 25.02.2008: Datenanforderung 2152 (Import Sachbearbeiter)",

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volume = "89",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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AU - Böhm, Hannes

AU - Gigan, Sylvain

AU - Blaser, Florian

AU - Zeilinger, Anton

AU - Aspelmeyer, Markus

AU - Langer, Gregor

AU - Bäuerle, Dieter

AU - Hertzberg, Jared B.

AU - Schwab, K C

N1 - DOI: 10.1063/1.2393000 Coden: APPLA Affiliations: Faculty of Physics, University of Vienna, Boltzmanngasse 5, A-1090 Vienna, Austria; Institute for Quantum Optics and Quantum Information (IQOQI), Austrian Academy of Sciences, Boltzmanngasse 3, A-1090 Vienna, Austria; Institute for Applied Physics, Johannes-Kepler-University Linz, Altenbergerstr. 69, A-4040 Linz, Austria; Department of Physics, University of Maryland, College Park, MD 20740; Laboratory for Physical Sciences, University of Maryland, College Park, MD 20740; University of California, Berkeley, CA 94720-1740; Department of Physics, Cornell University, Ithaca, NY 14853 Adressen: Böhm, H.R.; Institute for Quantum Optics and Quantum Information (IQOQI); Austrian Academy of Sciences; Boltzmanngasse 3 A-1090 Vienna, Austria Source-File: Phys070307scopus.csv Import aus Scopus: 2-s2.0-33751556187 Importdatum: 09.03.2007 16:10:16 25.02.2008: Datenanforderung 2152 (Import Sachbearbeiter)

PY - 2006

Y1 - 2006

N2 - The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-PŽrot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high- Q high-finesse cavities on chip. Œ 2006 American Institute of Physics.

AB - The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-PŽrot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high- Q high-finesse cavities on chip. Œ 2006 American Institute of Physics.

U2 - 10.1063/1.2393000

DO - 10.1063/1.2393000

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VL - 89

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 22

M1 - 223101

ER -

High reflectivity high-Q micromechanical Bragg mirror

Abstract

Austrian Fields of Science 2012

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