Projects of affiliated persons per year
| Original language | English |
|---|---|
| Article number | 125003 |
| Number of pages | 9 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 31 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - Dec 2021 |
Funding
The financial support by the Austrian Federal Ministry for Digital and Economic Affairs, the National Foundation for Research, Technology and Development and the Christian Doppler Research Association is gratefully acknowledged. The computational results presented have been achieved in part using the Vienna Scientific Cluster (VSC). M Trupke and G Wachter gratefully acknowledge support from the EU H2020 framework programme (QuanTELCO, 862721), the FWF (SiC-EiC, I 3167-N27), and the FFG (QSense4Power, 877615). The authors acknowledge TU Wien Bibliothek for financial support through its Open Access Funding Programme.
Austrian Fields of Science 2012
- 103026 Quantum optics
- 102009 Computer simulation
Keywords
- plasma etching
- topography simulations
- microcavity resonators
- level-set
- ray-tracing
- PROFILE EVOLUTION
- FLUX CALCULATION
- MONTE-CARLO
- SIMULATION
- FRAMEWORK
- SI
- SOFTWARE
- RATES
- LASER
- Topography simulations
- Level-set
- Plasma etching
- Ray-tracing
- Microcavity resonators
Fingerprint
Dive into the research topics of 'Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators'. Together they form a unique fingerprint.Projects
- 2 Finished
-
QuanTELCO: Quantum Emitters for Telecommunication in the O-Band
Trupke, M. (Project Lead)
1/10/19 → 30/09/22
Project: Research funding
-
SiC-EiC: Quantum control of spin centers in silicon carbide with microcavities
Trupke, M. (Project Lead) & Paulovics, V. (Admin)
1/01/17 → 31/12/20
Project: Research funding
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