Quantitative Modeling of Nanopore Formation in 2D MoS₂ by Swift Heavy-Ion Irradiation

Swift heavy-ion irradiation provides a versatile route for nanostructuring two-dimensional (2D) materials, with potential applications ranging from membrane engineering to electronic and sensing technologies. Here, we combine high-resolution scanning transmission electron microscopy with atomistic simulations to demonstrate controlled nanopore formation in monolayer MoS2, with pore sizes governed by stochastic energy transfer. By incorporating electron bunching, spatial straggling, and energy loss through escaping particles, our energy-transfer model quantitatively reproduces experimental pore size distributions and surpasses conventional stopping power predictions. These results deepen our understanding of ion–matter interactions in 2D systems and enable the controlled fabrication of functional nanostructures via ion irradiation.