Roadmap for focused ion beam technologies

Katja Höflich; Gerhard Hobler; Frances I. Allen; Tom Wirtz; Gemma Rius; Lisa McElwee-White; Arkady V. Krasheninnikov; Matthias Schmidt; Ivo Utke; Nico Klingner; Markus Osenberg; Rosa Córdoba; Flyura Djurabekova; Ingo Manke; Philip Moll; Mariachiara Manoccio; José María De Teresa; Lothar Bischoff; Johann Michler; Olivier De Castro; Anne Delobbe; Peter Dunne; Oleksandr V. Dobrovolskiy; Natalie Frese; Armin Gölzhäuser; Paul Mazarov; Dieter Koelle; Wolfhard Möller; Francesc Pérez-Murano; Patrick Philipp; Florian Vollnhals; Gregor Hlawacek

doi:10.1063/5.0162597

Roadmap for focused ion beam technologies

Katja Höflich (Corresponding author)
, Gerhard Hobler (Corresponding author)
, Frances I. Allen (Corresponding author)
, Tom Wirtz (Corresponding author)
, Gemma Rius (Corresponding author)
, Lisa McElwee-White
, Arkady V. Krasheninnikov
, Matthias Schmidt
, Ivo Utke
, Nico Klingner
, Markus Osenberg
, Rosa Córdoba
, Flyura Djurabekova
, Ingo Manke
, Philip Moll
, Mariachiara Manoccio
, José María De Teresa
, Lothar Bischoff
, Johann Michler
, Olivier De Castro

Anne Delobbe, Peter Dunne, Oleksandr V. Dobrovolskiy, Natalie Frese, Armin Gölzhäuser, Paul Mazarov, Dieter Koelle, Wolfhard Möller, Francesc Pérez-Murano, Patrick Philipp, Florian Vollnhals, Gregor Hlawacek (Corresponding author)

Nanomagnetism and Magnonics

Publications: Contribution to journal › Review › Peer Reviewed

Abstract

The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

Original language	English
Article number	041311
Number of pages	93
Journal	Applied Physics Reviews
Volume	10
Issue number	4
DOIs	https://doi.org/10.1063/5.0162597
Publication status	Published - 26 Dec 2023

Funding

This publication is based on the work from the COST Action FIT4NANO CA19140, supported by COST (European Cooperation in Science and Technology) https://www.cost.eu/ and http://www.fit4nano.eu/. The authors would like to thank the FIT4NANO members for participating in the survey that forms part of Sec. V B, as well as for input provided during in-person meetings and online discussions. Specifically, we would like to thank (in alphabetical order) Richard J. Curry, Damjana Drobne, Ádám Gali, Hans Hofsäss, Peter Hosemann, Karen L. Kavanagh, Daniel Kiener, Wolfgang Lang, Elisabeth A. Müller Gubler, Pablo A. Postigo, Paul Räcke, Joakim Reuteler, Samuel M. Stavis, Iwona B. Szymańska, Edgar J.D. Vredenbregt, and Robert Winkler for their valuable feedback on the manuscript. The writing of this document and the implementation of FIT4NANO also benefitted greatly from the guidance and support of worldwide FIB manufacturers and add-on producers, including (in alphabetical order) Carl Zeiss, Ionoptika, Kleindiek Nanotechnik, Nanores, NenoVision, Orsay Physics, PlasmaSolve, Quantum Design Microscopy, RAITH, Tescan, ThermoFisher Scientific, TOFWERK, and X-Spektrum.

Austrian Fields of Science 2012

103033 Superconductivity
103042 Electron microscopy
210004 Nanomaterials

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10.1063/5.0162597

Cite this

Höflich, K., Hobler, G., Allen, F. I., Wirtz, T., Rius, G., McElwee-White, L., Krasheninnikov, A. V., Schmidt, M., Utke, I., Klingner, N., Osenberg, M., Córdoba, R., Djurabekova, F., Manke, I., Moll, P., Manoccio, M., De Teresa, J. M., Bischoff, L., Michler, J., ... Hlawacek, G. (2023). Roadmap for focused ion beam technologies. Applied Physics Reviews, 10(4), Article 041311. https://doi.org/10.1063/5.0162597

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title = "Roadmap for focused ion beam technologies",

abstract = "The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.",

author = "Katja H{\"o}flich and Gerhard Hobler and Allen, \{Frances I.\} and Tom Wirtz and Gemma Rius and Lisa McElwee-White and Krasheninnikov, \{Arkady V.\} and Matthias Schmidt and Ivo Utke and Nico Klingner and Markus Osenberg and Rosa C{\'o}rdoba and Flyura Djurabekova and Ingo Manke and Philip Moll and Mariachiara Manoccio and \{De Teresa\}, \{Jos{\'e} Mar{\'i}a\} and Lothar Bischoff and Johann Michler and \{De Castro\}, Olivier and Anne Delobbe and Peter Dunne and Dobrovolskiy, \{Oleksandr V.\} and Natalie Frese and Armin G{\"o}lzh{\"a}user and Paul Mazarov and Dieter Koelle and Wolfhard M{\"o}ller and Francesc P{\'e}rez-Murano and Patrick Philipp and Florian Vollnhals and Gregor Hlawacek",

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Höflich, K, Hobler, G, Allen, FI, Wirtz, T, Rius, G, McElwee-White, L, Krasheninnikov, AV, Schmidt, M, Utke, I, Klingner, N, Osenberg, M, Córdoba, R, Djurabekova, F, Manke, I, Moll, P, Manoccio, M, De Teresa, JM, Bischoff, L, Michler, J, De Castro, O, Delobbe, A, Dunne, P, Dobrovolskiy, OV, Frese, N, Gölzhäuser, A, Mazarov, P, Koelle, D, Möller, W, Pérez-Murano, F, Philipp, P, Vollnhals, F & Hlawacek, G 2023, 'Roadmap for focused ion beam technologies', Applied Physics Reviews, vol. 10, no. 4, 041311. https://doi.org/10.1063/5.0162597

TY - JOUR

T1 - Roadmap for focused ion beam technologies

AU - Höflich, Katja

AU - Hobler, Gerhard

AU - Allen, Frances I.

AU - Wirtz, Tom

AU - Rius, Gemma

AU - McElwee-White, Lisa

AU - Krasheninnikov, Arkady V.

AU - Schmidt, Matthias

AU - Utke, Ivo

AU - Klingner, Nico

AU - Osenberg, Markus

AU - Córdoba, Rosa

AU - Djurabekova, Flyura

AU - Manke, Ingo

AU - Moll, Philip

AU - Manoccio, Mariachiara

AU - De Teresa, José María

AU - Bischoff, Lothar

AU - Michler, Johann

AU - De Castro, Olivier

AU - Delobbe, Anne

AU - Dunne, Peter

AU - Dobrovolskiy, Oleksandr V.

AU - Frese, Natalie

AU - Gölzhäuser, Armin

AU - Mazarov, Paul

AU - Koelle, Dieter

AU - Möller, Wolfhard

AU - Pérez-Murano, Francesc

AU - Philipp, Patrick

AU - Vollnhals, Florian

AU - Hlawacek, Gregor

PY - 2023/12/26

Y1 - 2023/12/26

N2 - The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

AB - The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

UR - https://www.scopus.com/pages/publications/85181095616

U2 - 10.1063/5.0162597

DO - 10.1063/5.0162597

M3 - Review

AN - SCOPUS:85181095616

SN - 1931-9401

VL - 10

JO - Applied Physics Reviews

JF - Applied Physics Reviews

IS - 4

M1 - 041311

ER -

Roadmap for focused ion beam technologies

Abstract

Funding

Austrian Fields of Science 2012

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